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Theoretical Analysis of the Non-contact Transport Device "Float Chuck" Using Gas Vertical Jet Flow Method

Created a formula to theoretically elucidate the non-contact transport device "Float Chuck SA-C type" using a vertical gas jet method.

Non-contact transport device "Float Chuck SA-C type" theoretical calculation formula This formula is the theoretical calculation formula for the non-contact transport device "Float Chuck SA-C type" (patent) developed by Solar Research Institute Co., Ltd. Below is an overview of the "Float Chuck SA-C type." Additionally, the following assumptions are made: (1) The gap with the member is considered to be very small compared to the pad radius of the "Float Chuck SA-C type." Therefore, the flow can be approximated as one-dimensional flow. (2) The jet ejected from nozzle O either hits the cushion chamber wall or flows smoothly along the AB surface. In this case, it is estimated that secondary flow containing vortices occurs near point A and near the collision point C of the jet. However, these effects are ignored in this analysis. (3) The compressibility of the flow in the jet and within the pad is neglected.